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“Background With the rapid increase of demand for the devices used in microwave band, ferromagnetic thin films with the potential for excellent magnetic property in the GHz range, owing to their special structure characteristics and free from Snoek limitation, have been widely studied in recent years. The basic requirements for magnetic films operated in high frequency are high permeability (μ) and high resistivity (ρ) in GHz range, and metal insulating films, especially Fe and Co based films, have enormous potential
to achieve a high eltoprazine permeability, owing to their high saturation magnetization and suitable anisotropic field [1–3]. For the monolayer ferromagnetic films, it is promising to achieve high microwave permeability to increase film thickness. However, the negative influence, the serious skin effect and eddy current [4, 5], and the obvious out-of-plane anisotropy in the high frequency, will block the increasing of the permeability, while the thin magnetic films, with specific multilayer structure design, can efficiently avoid the above negative effect and improve high-frequency properties by leading into different dielectric layers [6]. In this study, FeCo-SiO2 monolayer films and FeCo/(FeCo)0.63(SiO2)0.37 multilayer films were prepared by co-sputtering and tandem sputtering on flexible substrates, respectively, and in order to discuss the improvement of multilayer films, the high-frequency properties of both films whose FeCo content was about 72 at % were investigated.